{"product_id":"accu-acu20fd-high-accuracy-thermal-mass-flow-controller-meter","title":"ACCU ACU20FD High Accuracy Thermal Mass Flow Controller \/ Meter","description":"\u003cp\u003eThe ACCU ACU20FD series is a high-accuracy thermal mass flow controller and flow meter for gases, with a measurement error of ±0.5% of full scale over a range from 2 SCCM to 6000 SLM. Its sensor probe combines a velocity sensor and a temperature sensor, both platinum RTDs sealed in 316 stainless steel, so the effects of temperature and pressure changes are compensated automatically. The flow rate is derived from the power needed to keep the heated sensor at a constant temperature above the gas.\u003c\/p\u003e\n\u003cp\u003eTypical uses include semiconductor and IC process equipment (diffusion, epitaxy, CVD, oxidation, plasma etching, sputtering, ion implantation), coating systems, fibre optic fusion, micro-reactors, gas mixing and distribution systems, chromatography and other analytical instruments.\u003c\/p\u003e\n\u003ch4\u003eKey features\u003c\/h4\u003e\n\u003cul\u003e\n\u003cli\u003eAccuracy ±0.5% F.S., linearity ±0.25% F.S., repeatability ±0.2% F.S.\u003c\/li\u003e\n\u003cli\u003eDirect mass flow measurement with automatic temperature compensation\u003c\/li\u003e\n\u003cli\u003eIntegrated PID controller; gas type can be switched by the user\u003c\/li\u003e\n\u003cli\u003eBypass (tubular shunt) design, resistant to clogging\u003c\/li\u003e\n\u003cli\u003eShort warm-up (usable after 30 s, optimal after 5 min), low zero drift\u003c\/li\u003e\n\u003cli\u003eSuitable for low- and high-pressure lines (up to 10 MPa for meters)\u003c\/li\u003e\n\u003cli\u003eRS232\/485 with Modbus and Profibus; analog I\/O\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003ch4\u003eApplications\u003c\/h4\u003e\n\u003cp\u003eVacuum coating, solar energy, semiconductors, petroleum and petrochemicals, coal and metallurgy, gas production and distribution, environmental protection, analytical instruments.\u003c\/p\u003e\n\u003cp\u003e\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0533\/5600\/3482\/files\/ACU20FD-English_version.pdf?v=1793292780\" target=\"_blank\" title=\"ACCU ACU20FD High Accuracy Thermal Mass Flow Controller datasheet\" rel=\"noopener noreferrer\"\u003eDATASHEET DOWNLOAD LINK\u003c\/a\u003e\u003c\/p\u003e\n\u003ctable class=\"table table-bordered\"\u003e\n\u003cthead\u003e\u003ctr\u003e\u003ctd colspan=\"2\"\u003e\u003cstrong\u003eTechnical specifications\u003c\/strong\u003e\u003c\/td\u003e\u003c\/tr\u003e\u003c\/thead\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003eFlow range\u003c\/td\u003e\n\u003ctd\u003e2 SCCM – 6000 SLM, depending on model (N\u003csub\u003e2\u003c\/sub\u003e calibration, conversion factors for other gases)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eTurndown\u003c\/td\u003e\n\u003ctd\u003eController 50:1 \/ Meter 100:1\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eAccuracy\u003c\/td\u003e\n\u003ctd\u003e±0.5% F.S.\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eLinearity \/ Repeatability\u003c\/td\u003e\n\u003ctd\u003e±0.25% F.S. \/ ±0.2% F.S.\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eResponse time\u003c\/td\u003e\n\u003ctd\u003eController \u0026lt;0.2 s \/ Meter \u0026lt;0.1 s\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eTemperature coefficient\u003c\/td\u003e\n\u003ctd\u003e±0.025% F.S.\/°C\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eWorking temperature\u003c\/td\u003e\n\u003ctd\u003e0 – 50 °C\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eWorking pressure\u003c\/td\u003e\n\u003ctd\u003eController: differential 0.1 – 0.5 MPa \/ Meter: pressure drop \u0026lt;0.01 MPa\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eMax. pressure\u003c\/td\u003e\n\u003ctd\u003e3 MPa \/ 10 MPa\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eLeak rate\u003c\/td\u003e\n\u003ctd\u003e1×10\u003csup\u003e-9\u003c\/sup\u003e Pa·m³\/s\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eBody \/ seals\u003c\/td\u003e\n\u003ctd\u003eStainless steel \/ Viton, Neoprene, NBR or metal\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eConnections\u003c\/td\u003e\n\u003ctd\u003eØ8, Ø10, Ø12, flange\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eProtection \/ mounting\u003c\/td\u003e\n\u003ctd\u003eIP40 \/ horizontal\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eDisplay\u003c\/td\u003e\n\u003ctd\u003eWith or without display\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eElectrical connection\u003c\/td\u003e\n\u003ctd\u003eDB9, RJ11, 5.5×2.1 power jack\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eDigital interface\u003c\/td\u003e\n\u003ctd\u003eRS232 \/ RS485, Modbus, Profibus\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eAnalog signals\u003c\/td\u003e\n\u003ctd\u003e0–5 V, 4–20 mA, 1–5 V\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003ePower supply\u003c\/td\u003e\n\u003ctd\u003e24 VDC or ±15 VDC\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\u003cp\u003eConfiguration options (pressure rating, range, display, signals, power supply, communication, seals, fittings) are selected in the order code. Contact us for a quotation specifying your gas and flow range.\u003c\/p\u003e","brand":"ACCU","offers":[{"title":"ACU20FD-LC Controller, 2 SCCM – 30 SLM","offer_id":57739052613958,"sku":"ACU20FD-LC-2SCCM-30SLM","price":0.0,"currency_code":"EUR","in_stock":true},{"title":"ACU20FD-LM Meter, 2 SCCM – 30 SLM","offer_id":57739052646726,"sku":"ACU20FD-LM-2SCCM-30SLM","price":0.0,"currency_code":"EUR","in_stock":true},{"title":"ACU20FD-MC Controller, 30 – 300 SLM","offer_id":57739052679494,"sku":"ACU20FD-MC-30-300SLM","price":0.0,"currency_code":"EUR","in_stock":true},{"title":"ACU20FD-MM Meter, 30 – 300 SLM","offer_id":57739052712262,"sku":"ACU20FD-MM-30-300SLM","price":0.0,"currency_code":"EUR","in_stock":true},{"title":"ACU20FD-BC Controller, 300 – 3000 SLM","offer_id":57739052745030,"sku":"ACU20FD-BC-300-3000SLM","price":0.0,"currency_code":"EUR","in_stock":true},{"title":"ACU20FD-BM Meter, 300 – 3000 SLM","offer_id":57739052777798,"sku":"ACU20FD-BM-300-3000SLM","price":0.0,"currency_code":"EUR","in_stock":true},{"title":"ACU20FD-HC Controller, 3000 – 5000 SLM","offer_id":57739052810566,"sku":"ACU20FD-HC-3000-5000SLM","price":0.0,"currency_code":"EUR","in_stock":true},{"title":"ACU20FD-HM Meter, 3000 – 5000 SLM","offer_id":57739052843334,"sku":"ACU20FD-HM-3000-5000SLM","price":0.0,"currency_code":"EUR","in_stock":true},{"title":"ACU20FDR-BC Low-DP Controller, 1000 – 3000 SLM","offer_id":57739052876102,"sku":"ACU20FDR-BC-1000-3000SLM","price":0.0,"currency_code":"EUR","in_stock":true},{"title":"ACU20FDR-HC Dual-Valve Controller, 4000 – 6000 SLM","offer_id":57739052908870,"sku":"ACU20FDR-HC-4000-6000SLM","price":0.0,"currency_code":"EUR","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0533\/5600\/3482\/files\/ACU20FD.png?v=1793292564","url":"https:\/\/www.thasar.com\/es\/products\/accu-acu20fd-high-accuracy-thermal-mass-flow-controller-meter","provider":"Thasar S.r.l.","version":"1.0","type":"link"}