PECVD Furnaces

MTI

1100C PE-HPCVD Rotary Furnace with In-situ Evaporator, 4 Channel MFC & Vacuum Pump - OTF-1200X-S-II-PEC4

MTI

1100C PECVD Rotary Furnace with Vacuum Pump - OTF-1200X-S-II-PECVD

MTI

1200C Dual Sliding Tube Furnace with 2 Tube & Flanges for PECVD - OTF1200XSDFPESL

MTI

1200C Max Two-Zone PECVD Tube Furnace (50 mm OD) with Pre-Heater and Auto-Sliding - OTF-1200X-II-50-PEMSL

MTI

1200C Max. PECVD Tube Furnace w/ 4 Channels Gas Delivery & Vacuum Pump - OTF-1200X-PEC4LV

MTI

1200C Max. Slid-able Dual Zone PECVD Furnace w/ Gas Delivery & Vacuum Pump - OTF-1200X-II-PEC4SL-LD

MTI

1200C Max. Ultrasonic Spray Pyrolysis 3-Zone Furnace for Nano Particles Synthesis - OTF-1200X-III-PGEP

MTI

300W 13.56MHz RF Generator for 50, 80 or 125 mm OD Tube Furnace - OTF-PECVD-RF

MTI

5" PECVD Split Tube Furnace (1200C Max.) with Vacuum Pump Station - OTF-1200X-5L-PE

MTI

5" Rotary Tube Furnace w/ Feeding & Receiving for Powder PE-CVD & Cleaning - OTF-1200X-III-R5-PECVD

MTI

ALD & PECVD Combination Tube Furnace System - OTF-1200X-ALD

MTI

Compact Auto-Sliding PECVD Furnace w/ 2" Tube and Vacuum Pump, Max. 1200C - OTF-1200X-S50-PESL

MTI

Roll to Roll PE-CVD System for Continuous Film Growth on Wire or Foil - OTF-1200X-II-PE-RR

MTI

Small Batch (12 pcs 6" Wafer) PECVD System ( CCP type ) for Pilot Test - PECVD-8-16