Silicon-Nitride on Silicon

MTI

1000 nm Silicon Nitride Film (LPCVD) on Si(100), P-type, B-doped 100 mm dia .x0.525mm thick, 1sp,R:1-20 ohm.cm

MTI

300 nmSilicon Nitride Film (LPCVD) on Si(100), N-type, P-doped 100 mm dia .x0.525mm thick, 1sp,R:1-20 ohm.cm - FmSi3N4onSiPa100D0525C1FT300

MTI

100 nm Silicon Nitride Film (PE-CVD) on Si(100)P-type ,B-doped 100 mm dia .x0.525mm thick, 1sp,R:0.001-0.005 ohm.cm - FmSi3N4onSiBa100D0525C1FT100