MTI  |  SKU: OTF1200XSDFPESL

1200C Dual Sliding Tube Furnace with 2 Tube & Flanges for PECVD - OTF1200XSDFPESL

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1200C Dual Sliding Tube Furnace with 2 Tube & Flanges for PECVD - OTF1200XSDFPESL

MTI

OTF1200XSDFPESL is a dual slidable PECVD (Plasma Enhanced Chemical Vapor Deposition) tube furnace system. It is a tool for PECVD with 2" ODx55"L Quartz tube & flanges and a max 1200°C achievable working temperature. Two 2" tube furnaces can be slide on the sliding rail to find positions for source materials thermal evaporation/sublimation and film deposition. Sliding the furnace from one side to another can achieve max. heating and cooling rates up to 100°C/min. 

SPECIFICATIONS

Furnace Structure
  • Both furnaces are double-layer steel structures with 1200°C max. working temperature.
  • Each Furnace has a 200mm heating zone and a 60 mm long constant temperature zone.
  • One pair of sliding rails are installed on the bottom of the furnace, which allows the furnace to be manually moved from side to side with a max sliding distance 400 mm.
  • Vacuum flanges are installed for immediate use.

Power of furnace
  •  AC 208-240V Single Phase, 50/60 Hz, 20 A air breaker required
  •  2.5 KW in total

Max. Temperature

  • 1200°C (<1 hour)

Continuous Temperature

  • 1100°C

Heating & Cooling Rates


  Heating Rate:
 15°C/sec (RT - 150°C);
 10°C/sec (150°C - 250°C);
  7°C/sec (250°C - 350°C);
  4°C/sec (350°C - 500°C);
  3°C/sec (350°C - 550°C);
  2°C/sec (550°C - 650°C);
  1°C/sec (650°C - 800°C);
 0.5°C/sec (800°C - 1000°C);
Cooling Rate:
15°C/sec (1000 - 950°C);
10°C/sec (950°C - 900°C);
7°C/sec (900°C - 850°C);
4°C/sec (850°C - 750°C);
2°C/sec (750°C - 600°C);
1.5°C/sec (600°C - 500°C);
1°C/sec (500°C - 400°C);
0.5°C/sec (400°C - 300°C);
Note:
The max heating and cooling rate is achieved by pre-heat one side of the processing tube to the target temperature and then slide the furnace to the other side. You may choose to place the sample in the pre-heat area or not.

Heating Zone Length

  • 200mm( ~8")  for each furnace

Constant Temperature Zone
  • 60 mm (+/-1°C @ 400-1200°C)

Plasma RF Generator
  • Output Power:          5 -300W adjustable with ± 1% stability
  • RF frequency:          13.56 MHz ±0.005% stability
  • Reflection Power:      200W max.
  • Matching:                 Automatic
  • RF Output Port:        50 ?, N-type, female
  • Noise:                      <50 dB. 
  • Power:                     208-240VAC, 50/60Hz
  • Cooling:                   Air cooling.

Processing Tube Size
  • High purity fused quartz tube
  • Size:  50mm O.D x 44mm I.D x1500 mm Length 
  • Optional:  S310 high temp alloy tube is available for higher pressure ( 100 PSI ) at the extra cost.

Temperature Controller
 
 
  • Two furnaces are PID automatic control with 30 programmable segments for precise control of heating rate, cooling rate, and dwell time.
  • Built-in over-temperature alarm and protection allow for operation without an attendant.
  • Two K-type thermal couples are included
  • Temperature Accuracy +/ - 1°C
  • Optional:  
    • The furnace may be operated by a PC by installing a control module. Please order an MTS-01 control module at extra cost. 
    • We recommend you order a computer (laptop) from us to avoid software installation problems.

 Vacuum Flanges
  • Optional flange with a KF25 vacuum port and digital vacuum gauge is available at extra cost ( Pic.1) and  water cold flange (Pic. 2).
  •   Pic. 1  Pic. 2
 Sliding Rails / Table
  • Double sliding rail made of Cr-plated steel
  • Sliding length: 1200 mm
  • Two slide-stopping clamps are included for holding the position of the furnaces.

Optional
  • Motorized sliding is available upon request (Pic. 1)
  • 1-9 channel gas mixing and delivery models are available (Pic.2)
  • Water Chiller for the lab equipment that needs water cooling. (Pic.3)
  • Heavy duty double stage rotary vane vacuum pump to get a high vacuum level (Pic.4)
              Pic. 1    Pic. 2     Pic. 3   Pic. 4 

 Dimensions
             
             780mm(L) x 600mm(W) x 710mm(H)

Warranty
  • One-year limited manufacturer's warranty (Consumable parts such as processing tubes, O-rings and heating elements are not covered by the warranty, please order replacements at related products below).

Compliance
  • CE Certified
  • NRTL or CSA certification is available at extra cost ($3500.00 for furnace ONLY).
  • Plasma Generator is CE ONLY

Application Notes

Click here to learn the installation of a gas regulator
  • Tube furnaces with quartz tubes are designed for use under vacuum and low pressure <  0.2 bar / 3 psi / 0.02 MPa
  • Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. Click here to learn about the installation of a gas regulator.
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