Mini CVD Tube Furnace with 2 Channel Gas Mixer, Vacuum Pump, and Vacuum Gauge - OTF-1200X-S50-2F

OTF-1200X-S50-2F Mini CVD tube furnace is a CE Certified split tube furnace for heating samples up to 1200°C. A KF25 Gas Outlet and a Digital Vacuum Gauge are installed in the right flange for connection with a 226L/m Mechanical Pump (with Pump Filter). The left flange is used to connect a 2 channel gas mixing station through the 1/4" gas pipe. The precision temperature controller will provide 30 segments of heating and cooling steps with +/- 1 °C accuracy. This furnace system also includes an anti-corrosive Pirani Capacitance Diaphragm Gauge to enable vacuum measurements with aggressive gases. In addition, you can get an accurate pressure reading with any mixed gases via the Digital Vacuum gauge.

Furnace	Structure	Heavy-duty steel casing Energy-efficient Al2O3 fibrous thermal insulation
	Power Consumption	1.75KW
	Input Voltage	AC110V (For using under AC 220V, please contact our tech. support team)
	Temperature	1200ºC Max. for < 1hr 1100ºC  for continuously heating Heating rate <= 10C/min
	Processing Tube	Quartz tube  50 x 43 x 450mm (O.D x I.D x Length)
	Heating Zone	Total heating zone length: 8" (200mm); Constant temp. zone: 2.3" (60mm) (+/-1°C) @ 900 °C. The following picture left shows the temp. distribution across the heating zone. Two thermal blocks are included and must be placed inside the tube as shown picture below                     click here to choose a crucible
	Temperature Controller	PID automatic control and auto-tune function. 30 programmable segments for control of heating and rate cooling rate and dwell time. Overheating & broken thermocouple protection. Over-temperature protection and alarm allow for operation without attendant(s). +/- 1 ºC temperature accuracy.
Vacuum Gauge	Corrosion-proof Capacitance Diaphragm Gauge is installed on the vacuum flange (left side) of the tube furnace and provides a wide measure range (10^-5 ~ 1000 torr). Accurate pressure reading with any mixed gases
Two Channel Gas Mixing Station	Two floating flow meters 16 to 100 mL/min flow rate range Three mechanical pressure gauges (mixing tank): -0.1-0.15 MPa, (0.01 MPa/grit) Vacuum needle valves are made of SS304 Three Pipe fittings for 1/4" pipe (nylon or stainless steel) on the back panel Compact size:  340Lx300Dx 180H mm ( 13.4"x12"x7") Click the pictures left to see more detail
Vacuum Flanges and Fittings	Vacuum fittings in standard package: one Digital vacuum gauge w/ 0.00001 ~ 1000 torr measurement range one 1/4" Swagelok tube connector two KF-25 quick clamps one 600mm length SS vacuum bellows Structure (click on pictures to enlarge)    Left side        Right side
Vacuum pump	Double Stage Rotary Vane Vacuum Pump EQ-FYP-Pump (156L/m) with oil trap, Exhaust Filter, Bellow& KF-D25 Inlet, and KF25 Clamp are included. Vacuum Pressure can reach 1E-2 Torr ( 50 m-Torr)
Net Weight	100 lbs
Product Dimensions	Furnace: 340 x 300 x 400 mm Vacuum Pump: 440 x 160 x 300 mm Gas Station: 340 x 300 x 180 mm
Shipping Weight	200lbs
Shipping Size	45x45x35"
Warranty	One-year limited manufacturer's warranty (Consumable parts such as processing tubes, O-rings and heating elements are not covered by the warranty, please order replacements at related products below).
Compliance	CE certified NTRL and  CSA certification is available upon request at the extra cost
Application Notes Click here to learn the installation of a gas regulator	Please click here to see our typical temperature profile calibration result at various temperatures.. In order to obtain an accurate temperature inside the tube furnace, you need to calibrate the temperature by yourself. Pls, click here to learn how. How to set up a ceramic tube and vacuum flange for MTI Tube Furnace. Warning: Tube furnaces with quartz tube are designed for use with a vacuum and low pressure < 0.2 bar / 3 psi  Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°C The flow rate for gases should be limited to < 200 SCCM (or 200 ml/min) for reducing thermal shocks to the tube Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. Click here to learn the installation of a gas regulator.
Operation Video