MTI  |  SKU: CGM3F-PTFE

Three Channel Compact Anti-Corrosion Gas Mixer Made of PTFE (100 -1000 mL/min) - EQ-CGM-3F-PTFE

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Three Channel Compact Anti-Corrosion Gas Mixer Made of PTFE (100 -1000 mL/min) - EQ-CGM-3F-PTFE

MTI

EQ-CGM-3F-PTFE is a compact three channel anti-corrosion gas mixing & delivery system, which can be put in a small fume-hood together with a tube furnace and be safer. All parts wetted with gas are made of PTFE (e.g. valve, pipe, mixing tank and flow-meter). It is designed for delivering corrosive gases, such as hydrogen sulfide (H2S) and hydrogen selenide ( H2Se) for CVD processing.


SPECIFICATIONS

Floating meter
  • Three anti-corrosive Floating Flow-meter made of PTFE material with flow rates of 100 - 1000 mL/min (0.1 - 1.0 L/min)
  • One Mechanical Pressure Gauge (mixing tank): 0 - 0.05 MPa, (0.02 MPa/grit)
Valve  Three needle valves made of PTFE material which controls gas outlet on the front panel

               
Gas Tank  500 mL gas tank made of PTFE
 A built-in gas mixing tank combines and mixes gases from three inlet channels.
Pipe fitting

  • Pipe fitting made of PTFE and accept  1/4" pipe (nylon or stainless steel)

                         
  • Three gas inlets with an independent gas flow meter for each channel.
  • 20' length 1/4" PTFE pipe is included for immediate use
Dimension
  • Compact size:  340Lx300Dx 180H, mm    ( 13.4"x12"x7").
  • Net Weight: 16 Lb
Shipping
  • Shipping dimension:  TBD
  • Shipping weight: 50 lbs

Warranty

  Two years limited with lifetime support

Related Products

CVD & PECVD Furnace                                                  Click picture below to order bubbler or evaporator for CVD
                                      
                      
Oxygen Monitoring An Oxygen Sensor can be used to monitor the oxygen level of gas(es) used in CVD systems for preventing or reducing oxidation. Please click the picture below to learn more:
        
Application Note
  • If your CVD processing involves corrosive gas, such as H2S, please consider using PTFE flange on your tube furnace
  • Also, please choose an anti-corrosion dry vacuum pump instead of an oil vacuum pump
                    
Operation
Instruction		  Operation Manual

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