ACCU ACU10FD Digital Thermal Mass Flow Controller / Meter
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ACCU ACU10FD Digital Thermal Mass Flow Controller / Meter
ACCU
The ACCU ACU10FD series is a digital thermal mass flow controller and flow meter for gases, offering laboratory-grade accuracy at an accessible level. Two temperature sensors are mounted on a capillary, upstream and downstream of the flow path; as gas flows it carries heat away, and the instrument derives the mass flow from the power needed to compensate for the resulting temperature difference. The measurement is therefore largely independent of gas temperature and pressure.
In the controller version, the measured flow is compared with the setpoint and the built-in regulating valve is adjusted continuously, giving closed-loop flow control. The series is available in low (up to 30 SLM), middle (30–300 SLM) and large (500–3000 SLM) ranges.
Key features
- Thermal principle, laboratory-level accuracy (±1.0% F.S.)
- High stability; bypass (tubular shunt) design that resists clogging
- Short warm-up time and low zero drift
- Digital RS232/485 Modbus interface plus analog I/O; optional LCD display
Applications
Vacuum coating, solar energy, semiconductors, petroleum and petrochemicals, coal and metallurgy, gas preparation and distribution, environmental protection, analytical instruments.
| Technical specifications | |
| Flow range | Low 100 SCCM – 30 SLM / Middle 30 – 300 SLM / Large 500 – 3000 SLM |
| Turndown | Controller 50:1 / Meter 100:1 |
| Accuracy | ±1.0% F.S. |
| Linearity / Repeatability | ±0.5% F.S. / ±0.2% F.S. |
| Response time | Controller <2 s / Meter <0.8 s |
| Temperature coefficient | ±0.025% F.S./°C |
| Working temperature | 0 – 50 °C |
| Working pressure | Controller: differential 0.05 – 0.5 MPa (Low), 0.1 – 0.5 MPa (Middle), 0.3 – 0.5 MPa (Large) / Meter: pressure drop <0.01 MPa |
| Max. pressure | 3 MPa / 10 MPa (meter) |
| Leak rate | 1×10-9 Pa·m³/s |
| Body / seals | Stainless steel / Viton, Neoprene, NBR |
| Connections | Low: 3, 6 mm, 1/8", 1/4" · Middle: Ø8, Ø10, Ø12 · Large: Ø12, flange |
| Electrical connection | DB15 |
| Digital interface | RS232 / RS485, Modbus |
| Analog signals | 0–5 V, 4–20 mA, 1–5 V |
| Power supply | ±15 VDC or 24 VDC |
Configuration options (pressure rating, range, display, gas, signals, power supply, communication, seals, fittings) are selected in the order code. Contact us for a quotation specifying your gas and flow range.
