ACCU ACU20FD High Accuracy Thermal Mass Flow Controller / Meter
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ACCU ACU20FD High Accuracy Thermal Mass Flow Controller / Meter
ACCU
The ACCU ACU20FD series is a high-accuracy thermal mass flow controller and flow meter for gases, with a measurement error of ±0.5% of full scale over a range from 2 SCCM to 6000 SLM. Its sensor probe combines a velocity sensor and a temperature sensor, both platinum RTDs sealed in 316 stainless steel, so the effects of temperature and pressure changes are compensated automatically. The flow rate is derived from the power needed to keep the heated sensor at a constant temperature above the gas.
Typical uses include semiconductor and IC process equipment (diffusion, epitaxy, CVD, oxidation, plasma etching, sputtering, ion implantation), coating systems, fibre optic fusion, micro-reactors, gas mixing and distribution systems, chromatography and other analytical instruments.
Key features
- Accuracy ±0.5% F.S., linearity ±0.25% F.S., repeatability ±0.2% F.S.
- Direct mass flow measurement with automatic temperature compensation
- Integrated PID controller; gas type can be switched by the user
- Bypass (tubular shunt) design, resistant to clogging
- Short warm-up (usable after 30 s, optimal after 5 min), low zero drift
- Suitable for low- and high-pressure lines (up to 10 MPa for meters)
- RS232/485 with Modbus and Profibus; analog I/O
Applications
Vacuum coating, solar energy, semiconductors, petroleum and petrochemicals, coal and metallurgy, gas production and distribution, environmental protection, analytical instruments.
| Technical specifications | |
| Flow range | 2 SCCM – 6000 SLM, depending on model (N2 calibration, conversion factors for other gases) |
| Turndown | Controller 50:1 / Meter 100:1 |
| Accuracy | ±0.5% F.S. |
| Linearity / Repeatability | ±0.25% F.S. / ±0.2% F.S. |
| Response time | Controller <0.2 s / Meter <0.1 s |
| Temperature coefficient | ±0.025% F.S./°C |
| Working temperature | 0 – 50 °C |
| Working pressure | Controller: differential 0.1 – 0.5 MPa / Meter: pressure drop <0.01 MPa |
| Max. pressure | 3 MPa / 10 MPa |
| Leak rate | 1×10-9 Pa·m³/s |
| Body / seals | Stainless steel / Viton, Neoprene, NBR or metal |
| Connections | Ø8, Ø10, Ø12, flange |
| Protection / mounting | IP40 / horizontal |
| Display | With or without display |
| Electrical connection | DB9, RJ11, 5.5×2.1 power jack |
| Digital interface | RS232 / RS485, Modbus, Profibus |
| Analog signals | 0–5 V, 4–20 mA, 1–5 V |
| Power supply | 24 VDC or ±15 VDC |
Configuration options (pressure rating, range, display, signals, power supply, communication, seals, fittings) are selected in the order code. Contact us for a quotation specifying your gas and flow range.
