ACCU ACU30FC Differential Pressure Mass Flow Controller / Meter
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ACCU ACU30FC Differential Pressure Mass Flow Controller / Meter
ACCU
The ACCU ACU30FC series is a differential pressure mass flow controller and flow meter for gases. Gas passing through a laminar throttling element creates a pressure drop that the sensor converts into an electrical signal; the flow is then calculated with the Hagen–Poiseuille equation. Because the measurement does not rely on the gas's specific heat, there is no specific-heat error, and close to 100 gases can be selected on the instrument without factory recalibration.
A built-in PID loop drives an electromagnetic proportional valve for precise flow control. The ACU30FC also measures volumetric flow, pressure and temperature, and shows all values on a large touch screen or sends them to a control system.
Key features
- No specific-heat error; real-time, high-precision readings
- Nearly 100 selectable gases without factory recalibration
- Multi-parameter measurement: mass flow, volume flow, pressure, temperature
- Very fast response (50 ms) with DSP-based control
- Compact body with large touch-screen display
- USB Type-C and Bluetooth connectivity, plus RS232/485 (Modbus), Profibus and DeviceNet
Applications
Vacuum coating, solar energy, analytical instruments, petroleum and petrochemicals, gas production and distribution, environmental protection, semiconductors, coal and metallurgy.
| Technical specifications | |
| Flow range | 2 SCCM – 3000 SLM, depending on model |
| Turndown | Controller 50:1 / Meter 100:1 |
| Accuracy | ±0.5% F.S. |
| Linearity / Repeatability | ±0.5% F.S. / ±0.2% F.S. |
| Stability | <±0.1% F.S. |
| Response time | 50 ms |
| Temperature coefficient | ±0.015% F.S./°C |
| Working temperature | -10 – 60 °C |
| Working pressure | Differential 0.05 – 0.5 MPa |
| Max. pressure | 1 MPa |
| Leak rate | 1×10-9 Pa·m³/s |
| Body / seals | Stainless steel / Viton, NBR, FFKM, EPDM |
| Connections | VCR, LOK, Ø8, Ø10, Ø12, flange and others |
| Protection / mounting | IP40 / horizontal |
| Electrical connection | DB9, RJ11, 5.5×2.1 power jack |
| Digital interface | RS232 / RS485 Modbus, Profibus, DeviceNet, USB-C, Bluetooth |
| Analog signals | 0–5 V, 4–20 mA, 1–5 V |
| Power supply | ±15 VDC or 24 VDC |
Configuration options (range, display, signals, power supply, communication, seals, fittings) are selected in the order code. Contact us for a quotation specifying your gas and flow range.
