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MTI  |  SKU: OTF1200XSHPCVD

Forno tubolare a 1200 C con meccanismo di spostamento interno per HPCVD - OTF-1200X-S-HPCVD

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Forno tubolare a 1200 C con meccanismo di spostamento interno per HPCVD - OTF-1200X-S-HPCVD

MTI

OTF-1200X-S-HPCVD is a compact 2" split tube furnace with an internal sample traveling system inside the processing tube. This allows the position & temperature control of the sample stage or crucible via touch screen digital controller. It is designed for multi-functional rapid thermal processing, such as hybrid physical-chemical deposition(HPCVD), rapid thermal evaporation (RTE), and as well Horizontal Bridgman Crystal Growth ( HDC) under various atmospheres for new-generation crystal research.

SPECIFICATIONS:

Split Tube Furnace
  • 208 - 240 VAC, 50/60Hz, 1.2 KW max. power consumption
  • Working temperature: 1100°C continuous and 1200°C Max.
  • 2" quartz tube (50mm O.D x 44mm I.D x 450mm L)  with vacuum-sealed flanges.
  • Optional: you may choose a dual-zone tube furnace at Pic below right at extra cost to create a higher thermal gradient or longer constant temperature zone
    1      -- two-zone furnace
Temperature Control
  • PID automatic control via solid-state relay with 30 steps programmable
  • Built-in Over Temperature and Thermocouple Failure Protection
  • +/-1°C accuracy
  • K-type thermal couple
  • Heating zone  Length: 200mm ( 8")
  • Constant temperature zone: 60 mm  (+/-1°C @ 1000 °C )
        
Vacuum Sealing
 
 
  • 2" quick clamp flange with 1/4'' fittings, vacuum gauge as well as needle valve on the right side
  • The right flange is connected to a stainless steel bellow which is stretchable up to 150 mm.
  • Left flange with quick-clamped KF25 vacuum port and 1/4'' barb venting valve 
  • Max. Vacuum level: 10E-2 torr by mechanical pump and 10-E5 by turbopump 
  (click the picture to see details )
Internal Traveling Mechanism &
PLC Control Panel
  • One 1/4" Dia. x 24'' long K-type thermal couple is inserted through the right flange to support a mini-crucible boat in the chamber. (click pic.1 to view)
  • A step motor ( 24VDC, 100W) drives the crucible inside the tube from the heating center to the right end of the furnace, L100 mm max. with air-tight
  • Touch screen panel allows control of travel distance and temperature display of crucible position (click pic.2 )
  • Traveling speed is constant at 180mm/ min. ( variable speed control is available upon request at additional cost )
  • A 50x20x20mm mini-crucible boat (~20ml) is installed on a thermal couple (click pic.3 to view).
  • AIN Sample Holder or Graphite Flat Substrate Holder for the wafer is available upon request, additional customization fee will apply (click pic.4 to view).
                                             
Pic.1               Pic.2                 Pic.3                    Pic.4                           Pic.5
Max. Heating & Cooling Rate
The max heating and cooling rate can be achieved by moving the sample into the pre-heated hot zone and moving the sample out from the hot zone. The typical ramp/cool rate is listed in below:
  Heating Rate:
 10°C/sec (150°C - 250°C);
7°C/sec (250°C - 350°C);
4°C/sec (350°C - 500°C);
3°C/sec (500°C - 550°C);
2°C/sec (550°C - 650°C);
1°C/sec (650°C - 800°C);
0.5°C/sec (800°C - 1000°C);
Cooling Rate:
10°C/sec (950°C - 900°C);
7°C/sec (900°C - 850°C);
4°C/sec (850°C - 750°C);
2°C/sec (750°C - 600°C);
1.5°C/sec (600°C - 500°C);
1°C/sec (500°C - 400°C);
0.5°C/sec (400°C - 300°C);
 
Optional Parts
  • You may need a right-angle valve & bellows to connect a vacuum pump ( click the 1st & 2nd pics to order )
  • Anti-Corrosive digital Gauge up to 10E-5 torr is optional for CVD application (Pic 3)
  • You may order a multi-channel gas delivery system for DVD or CVD operation ( Pic 4)
        
Laptop, software (Optional)
   
  • Brand new laptop with Microsoft Windows 10 and Microsoft Office 2013 (30 days free trial) for immediate use.
  • Labview-Based Temperature Control System (MTS01)enables users to edit temperature profiles, manage heat-treatment recipes, and record and plot data for MTI furnaces.


Compliance
  • CE Certified
  • NRTL or CSA certification is available upon request at extra cost.
Warning
  • Tube furnaces with quartz tubes are designed for use under vacuum and low pressure < 0.2 bars / 3 psi 
  • Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. Click here to learn the installation of a gas regulator.
  • Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°C
Operation Video 
    
Application Notes This multi-functional furnace is suitable for the applications in below:
  • RTE: Crucible loaded with evaporation material is placed in the center of the furnace, and moves sample holder to a downstream position with the appropriate temperature where the deposition takes place.
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